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ProScan H105E2OL


Encoded Motorized 6-inch Travel Stage For Evident/Olympus MX Industrial Microscopes

The ProScan H105E2OL is an encoded motorized XY flat-top stage designed for Evident/Olympus upright industrial microscopes

The  H105E2OL is optimized for scanning 6-inch semiconductor wafers.

With linear encoders and Prior's patented Intelligent Scanning Technology (IST) to enhance long-range repeatability, accuracy, and linearity it reliably locates specific regions. The 2 mm ballscrew enables it to cover the large surface area quickly for fast, efficient scanning

Its flat top plate allows easy access to the sample for loading and ensures compatibility with a wide range of optics

It is compatible with Olympus Stream Motion and Evident PRECiV software (appropriate package required).

This is an ‘OEM & Batch Order’ product. For more information visit our FAQs section.


    • Directly compatible with Evident/Olympus industrial microscopes and software
    • Aesthetic and user friendly flat top design
    • Travel range supports 6-inch wafers
    • Intelligent Scanning Technology™ (US Patent 7,330,307)
    • Embedded linear encoders for closed loop positional control
Travel range 154 mm x 154 mm
Uni-directional repeatability < 0.6 μm
Bidirectional repeatability < 0.9 μm
Metric accuracy < 0.12 μm/mm
Full travel metric accuracy < 12.8 μm
Resolution 0.1 μm
Squareness 25 arcsec
Maximum velocity 40 mm/s
Maximum load 10 kg
Encoders 0.1 μm linear encoders
Motor type 200 step
Screw pitch 2 mm
Weight 4.8 kg

Specifications as per datasheet. Please see datasheet for details.

  • H227 Glass plate (not suitable for transmitted light microscopy)

  • H231 Aluminium plate (H105)

  • H231B Aluminium plate (H105) with M4 and M6 tapped holes

  • HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers

  • HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers

Option Manufacturer Compatibility Notes
H105E2OL Evident/Olympus MX61, MX61L, MX63, MX63L

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